Accuracy of the subsurface damage parameters calculated by the finite difference algorithm
An important approach to characterize the full three-dimensional information of subsurface damage is to simulate the etching process of a sample reversely. The simulation starts from the morphology of the sample after the subsurface damage micro cracks being opened totally. During the etching experi...
Gardado en:
| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
EDP Sciences
2015-01-01
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| Series: | Journal of the European Optical Society-Rapid Publications |
| Assuntos: | |
| Acceso en liña: | https://jeos.edpsciences.org/articles/jeos/pdf/2015/01/jeos20151015056.pdf |
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