Attentional Ptycho-Tomography (APT) for three-dimensional nanoscale X-ray imaging with minimal data acquisition and computation time

Abstract Noninvasive X-ray imaging of nanoscale three-dimensional objects, such as integrated circuits (ICs), generally requires two types of scanning: ptychographic, which is translational and returns estimates of the complex electromagnetic field through the IC; combined with a tomographic scan, w...

Celý popis

Podrobná bibliografie

Hlavní autoři:	Iksung Kang, Ziling Wu, Yi Jiang, Yudong Yao, Junjing Deng, Jeffrey Klug, Stefan Vogt, George Barbastathis
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Nature Publishing Group 2023-05-01
Edice:	Light: Science & Applications
On-line přístup:	https://doi.org/10.1038/s41377-023-01181-8
Tagy:	Přidat tag Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!