Dry etching of single-point cutting tool made of nanopolycrystalline diamond using oxygen plasma (Translated) (Shapeable cutting-edge radius)
Dry etching with oxygen plasma was performed on a single-point cutting tool composed of nano-polycrystalline diamond to elucidate the shapeable cutting-edge radius (CER). The tool's CER was measured using an atomic force microscope employing a cantilever made of single-crystal silicon with a te...
Gorde:
| Egile Nagusiak: | , , |
|---|---|
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
The Japan Society of Mechanical Engineers
2024-02-01
|
| Saila: | Mechanical Engineering Journal |
| Gaiak: | |
| Sarrera elektronikoa: | https://www.jstage.jst.go.jp/article/mej/11/1/11_23-00427/_pdf/-char/en |
| Etiketak: |
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!
|