Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process
A Nb superconducting tunable microstrip gap resonator has been designed and fabricated with low stress Au RF MEMS dc-contact switches. The resonator can be tuned in four states from 12-15 GHz. Simulations show that the resonator Q is highly sensitive to the contact resistance of the MEMS when the sw...
Gorde:
| Egile Nagusiak: | , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
IEEE
2017-01-01
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| Saila: | IEEE Journal of the Electron Devices Society |
| Gaiak: | |
| Sarrera elektronikoa: | https://ieeexplore.ieee.org/document/7935538/ |
| Etiketak: |
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