Grooving and Absorption on Substrates to Reduce the Bulk Acoustic Wave for Surface Acoustic Wave Micro-Force Sensors
Improving measurement accuracy is the core issue with surface acoustic wave (SAW) micro-force sensors. An electrode transducer can stimulate not only the SAW but also the bulk acoustic wave (BAW). A portion of the BAW can be picked up by the receiving transducer, leading to an unwanted or spurious s...
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| Principais autores: | , , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
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MDPI AG
2024-05-01
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| Serier: | Micromachines |
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| Online adgang: | https://www.mdpi.com/2072-666X/15/5/637 |
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