Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis
Recent advancements in cryogenic etching, characterized by high aspect ratios and etching rates, address the growing demand for enhanced performance and reduced power consumption in electronics. To precisely maintain the temperature under high loads, the cascade mixed-refrigerant cycle (CMRC) is pre...
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| Auteurs principaux: | , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI AG
2024-10-01
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| Collection: | Energies |
| Sujets: | |
| Accès en ligne: | https://www.mdpi.com/1996-1073/17/19/4969 |
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