MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS
This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that micr...
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| Autores principales: | , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Technical University of Moldova
2020-03-01
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| Colección: | Journal of Engineering Science (Chişinău) |
| Materias: | |
| Acceso en línea: | https://jes.utm.md/wp-content/uploads/sites/20/2020/05/JES-2020-2-pp_52-61.pdf |
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