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Effect of the Degree of Li<sub>3</sub>PO<sub>4</sub> Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films

Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10<sup>−6</sup> S...

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Principais autores: Alexander Kamenetskikh, Nikolay Gavrilov, Alexey Ershov, Petr Tretnikov
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2023-10-01
Serier:Membranes
Fag:
solid electrolyte
LiPON
anodic evaporation
ionic conductivity
Online adgang:https://www.mdpi.com/2077-0375/13/10/847
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