Guided domino lithography for uniform fabrication of single-digit-nanometer scale plasmonic nanoantenna

Single-digit-nanometer scale plasmonic nanoantenna platforms are widely used in optical sensors, quantum plasmonics, and other applications. Uniform and reliable fabrications with a single-digit-nanometer resolution are desirable for diverse quantum nanophotonic device applications, but improving th...

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Principais autores:	Oh Dong Kyo, Kim Yeseul, Kim Jaekyung, Kim Inki, Rho Junsuk
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Wiley 2023-03-01
coleção:	Nanophotonics
Assuntos:	cascade domino lithography extreme near-field enhancement guided domino lithography sub-nm resolution ultra-sharp tip
Acesso em linha:	https://doi.org/10.1515/nanoph-2022-0694
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