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Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental no...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Zhuoyue Zheng, Chen Wang, Linlin Wang, Zeyu Ji, Xiaoxiao Song, Pui-In Mak, Huafeng Liu, Yuan Wang
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2024-02-01
Rangatū:Micromachines
Ngā marau:
Urunga tuihono:https://www.mdpi.com/2072-666X/15/3/352
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