A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control
A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to ob...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2019-07-01
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| coleção: | Micromachines |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2072-666X/10/8/496 |
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