A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors
This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress indu...
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| Principais autores: | , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI AG
2008-11-01
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| Serier: | Sensors |
| Fag: | |
| Online adgang: | http://www.mdpi.com/1424-8220/8/11/7530/ |
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