Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO)6)

Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused electron beam-induced deposition (FEBID) of this...

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Bibliografische Detailangaben

Hauptverfasser:	Po-Yuan Shih, Maicol Cipriani, Christian Felix Hermanns, Jens Oster, Klaus Edinger, Armin Gölzhäuser, Oddur Ingólfsson
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	Beilstein-Institut 2022-02-01
Schriftenreihe:	Beilstein Journal of Nanotechnology
Schlagworte:	dissociative electron attachment dissociative ionisation focused electron beam-induced deposition molybdenum hexacarbonyl
Online-Zugang:	https://doi.org/10.3762/bjnano.13.13
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