Toward an Accurate IR Remote Sensing of Body Temperature Radiometer Based on a Novel IR Sensing System Dubbed Digital TMOS
A novel uncooled thermal sensor based on a suspended transistor, fabricated in standard CMOS-SOI process, and released by dry etching, dubbed Digital TMOS, has been developed. Using the transistor as the sensing element has advantages in terms of internal gain, low power, low-cost technology, and hi...
Gespeichert in:
| Hauptverfasser: | , , , , |
|---|---|
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2022-04-01
|
| Schriftenreihe: | Micromachines |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/2072-666X/13/5/703 |
| Tags: |
Keine Tags, Fügen Sie das erste Tag hinzu!
|