Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane

Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, th...

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Bibliografiset tiedot

Päätekijät:	Luhao Gou, Hongliang Wang, Qi Ding, Yulong Liu, Runze Yang, Feng Zhang, Pengcheng Zhang, Gang Cao
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	MDPI AG 2024-02-01
Sarja:	Micromachines
Aiheet:	CMUT accelerometer acceleration sensitivity ring perforations
Linkit:	https://www.mdpi.com/2072-666X/15/2/279
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