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High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

This paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the...

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Principais autores: Do-Hyeon Choi, In-Jun Yang, Min-Ki Hong, Dong-Hoon Jung, Won-Ho Kim
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2023-10-01
Serier:Machines
Fag:
permanent motor
torque ripple
tapering
IPMSM
ETCH process
semiconductor
Online adgang:https://www.mdpi.com/2075-1702/11/11/991
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