Mechanism of Ultra-Low-Speed Smoothness in Ultrasonic Motors Based on a Macro-Micro Multi-Scale Finite Element Model

The conventional microstepping driving method suffers from significant periodic speed oscillations under ultra-low-speed conditions, which fail to meet the stringent demand for smooth operation of ultrasonic motors in semiconductor packaging. Most existing theories and simulations of ultrasonic moto...

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Principais autores:	Weijun Zeng, Tong Xie, Qiaoliang Peng, Hengyu Zhang, Yifan Jiang, Lin Yang
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2026-05-01
Colecção:	Micromachines
Assuntos:	ultrasonic motor superimposed pulse driving method microstepping driving method motor speed fluctuation rate ADINA finite element simulation ultrasonic friction reduction
Acesso em linha:	https://www.mdpi.com/2072-666X/17/6/659
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