Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module

This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the phot...

Бүрэн тодорхойлолт

Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Syuan-Cheng Chang, Chung-Ping Chang, Yung-Cheng Wang, Ze-Fong You
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	University North 2022-01-01
Цуврал:	Tehnički Glasnik
Нөхцлүүд:	interferometer linear displacement optoelectronic module straightness measurement
Онлайн хандалт:	https://hrcak.srce.hr/file/404733
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!