Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator

This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated v...

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Bibliografske podrobnosti

Principais autores:	Jun Zhang, Chengjie Zhou, Yangfang Wu
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2025-05-01
Serija:	Micromachines
Teme:	silicon microfluidic chip pneumatic proportional pressure valve V-shaped electrothermal microactuator COMSOL Multiphysics AMESim
Online dostop:	https://www.mdpi.com/2072-666X/16/5/566
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