Single-Ended Eddy Current Micro-Displacement Sensor with High Precision Based on Temperature Compensation

To measure the micro-displacement reliably with high precision, a single-ended eddy current sensor based on temperature compensation was studied in detail. At first, the principle of the eddy current sensor was introduced, and the manufacturing method of the probe was given. The overall design plan...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Zhengping Xu, Yongtong Feng, Yi Liu, Fengxin Shi, Yang Ge, Han Liu, Wei Cao, Hong Zhou, Shuang Geng, Wenqi Lin
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2024-03-01
Schriftenreihe:	Micromachines
Schlagworte:	eddy current sensor micro-displacement digital phase discriminator temperature compensation
Online-Zugang:	https://www.mdpi.com/2072-666X/15/3/366
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