Thermoelectric Photosensor Based on Ultrathin Single-Crystalline Si Films <sup>†</sup>
Ultrathin Si films have a reduced thermal conductivity in comparison to Si bulk due to phonon scattering at the surfaces. Furthermore, the small thickness guarantees a reduced thermal mass (in the µJ/K range), which opens up the possibility of developing thermal sensors with a high sensitivity....
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2019-03-01
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| Series: | Sensors |
| Assuntos: | |
| Acceso en liña: | https://www.mdpi.com/1424-8220/19/6/1427 |
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