Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications
In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three met...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2021-07-01
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| coleção: | Sensors |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/1424-8220/21/15/5101 |
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