Structural properties of ZnO films obtained on SiC/porous-Si by the method of high frequence magnetron sputtering
The morphological and structural properties of ZnO thin films grown by RF magnetron sputtering using a SiC/porous-Si/Si template were studied. The preparation of the ZnO/SiC/porous-Si/Si heterostructure was carried out in two stages: deposition of SiC films by solid-phase epitaxy followed by the dep...
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| Principais autores: | , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Vasyl Stefanyk Carpathian National University
2025-09-01
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| Serier: | Фізика і хімія твердого тіла |
| Fag: | |
| Online adgang: | https://journals.pnu.edu.ua/index.php/pcss/article/view/8561 |
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