Morphological evolution of silicon surfaces nanopatterned by focused ion beam irradiation
Abstract Nanopatterning on solid surface has emerged as an important tool in the field of nanotechnology, nano/micro-electromechanical systems (NEMS/MEMS), photonics, and biotechnology. Among the available techniques, focused ion beam (FIB) enables controlled and precise nanopatterning on solid surf...
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| Glavni autor: | |
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| Format: | Artigo |
| Jezik: | Inglês |
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Nature Portfolio
2026-01-01
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| Serija: | Scientific Reports |
| Teme: | |
| Online pristup: | https://doi.org/10.1038/s41598-025-33947-y |
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