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Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator

The reliability and stability of MEMS electrostatic comb resonators have become bottlenecks in practical applications. However, there are few studies that comprehensively consider the nonlinear dynamic behavior characteristics of MEMS systems and devices in a coupled field so that the related simula...

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Principais autores: Zhanqing Yu, Shiping Chen, Ya Mou, Fade Hu
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2022-01-01
Serier:Sensors
Fag:
MEMS
microelectrostatic comb resonator
multifield coupling
dynamics research
air damping
finite element analysis
Online adgang:https://www.mdpi.com/1424-8220/22/3/1056
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