Tuning the epsilon near zero wavelength of ITO in the near-IR spectral region via post-process free sputtering
Indium tin oxide (ITO) has become an important material in photonics due to its transparency, high electrical conductivity, and, more recently, its epsilon-near-zero (ENZ) properties for nonlinear optics. In this work, we present a single-step RF magnetron sputtering protocol optimised for hybrid-EN...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
IOP Publishing
2026-01-01
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| Colecção: | JPhys Materials |
| Assuntos: | |
| Acesso em linha: | https://doi.org/10.1088/2515-7639/ae5e0b |
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