High-Throughput Thermodynamic Analysis of TaC Coatings by Chemical Vapor Deposition
For guiding the growth regulation of high-purity TaC coatings for semiconductor high-temperature furnace components, the high-throughput thermodynamic simulation calculation of TaC coating growth process was carried out by Thermo-calc software, and the effects of deposition temperature, pressure and...
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| Glavni autor: | |
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| Format: | Artigo |
| Jezik: | Chinês |
| Izdano: |
Editorial Department of Materials Protection
2024-04-01
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| Serija: | Cailiao Baohu |
| Teme: | |
| Online pristup: | http://www.mat-pro.com/fileup/1001-1560/PDF/20240402.pdf |
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