A Novel Design of Modular Bearingless PMSM Motor for Ultra Clean Applications
This paper introduces a novel design for achieving bearingless operation in a modular PMSM motor, specifically used for ultra-cleanroom applications in semiconductor wafer production. In order to achieve this operation, a stable and independent suspension of the rotor is crucial, which can be obtain...
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| Hoofdauteurs: | , , , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
IEEE
2024-01-01
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| Reeks: | IEEE Access |
| Onderwerpen: | |
| Online toegang: | https://ieeexplore.ieee.org/document/10414091/ |
| Tags: |
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