Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology
The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell...
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| 主要な著者: | , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI AG
2015-10-01
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| シリーズ: | Micromachines |
| 主題: | |
| オンライン･アクセス: | http://www.mdpi.com/2072-666X/6/10/1439 |
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