Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO₂ Laser

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO₂ laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity...

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Prif Awduron:	Hui Zhang, Yi Li, Zhuo Zhang, Chaoming Yang, Mingshan Liang, Yong Hu, Heming Wei, Fufei Pang
Fformat:	Artigo
Iaith:	Inglês
Cyhoeddwyd:	MDPI AG 2022-06-01
Cyfres:	Sensors
Pynciau:	optical fiber sensor Fabry–Pérot cavity pressure sensing CO<sub>2</sub> laser welding
Mynediad Ar-lein:	https://www.mdpi.com/1424-8220/22/13/4700
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!