A Closed-Loop Micro-Ultrasonic Motor Control System With Extremum Seeking

Microactuators are an essential technology to revolutionize existing micromachines, but making them closed-loop controlled with an internal sensor is a great challenge due to the limited size of the components. In this paper, we build a micro-ultrasonic motor in the 2–3 mm scale, combine it w...

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Hlavní autoři:	Mohamed M. Khalil, Naoya Masuda, Kotaro Takayama, Tomoaki Mashimo
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	IEEE 2023-01-01
Edice:	IEEE Access
Témata:	Piezoelectric actuators ultrasonic motors micromotors closed-loop control extremum seeking controller temperature disturbance
On-line přístup:	https://ieeexplore.ieee.org/document/10058517/
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