Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066”
We would like to respond to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, https://doi.org/10.1016/j.matdes.2016.12.066″. Mangindaan et al. raised concerns about deriving the 2nd order equations for optimizing the W-pattern CMP slurry compositions. However, we clarify that there...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Elsevier
2024-05-01
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| Colecção: | Materials & Design |
| Acesso em linha: | http://www.sciencedirect.com/science/article/pii/S0264127524003095 |
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