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Enhancing parameters of silicon varactors using laser gettering

The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyze...

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Principais autores: I. M. Vikulin, V. N. Litvinenko, S. V. Shutov, A. I. Maronchuk, A. N. Demenskiy, V. I. Glukhova
Formato: Artigo
Idioma:Inglês
Publicado: Politehperiodika 2018-04-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
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Acceso en liña:https://tkea.com.ua/index.php/journal/article/view/163
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