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Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor po...

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Furkejuvvon:
Bibliográfalaš dieđut
Váldodahkkit: Yi-Fei Zhang, Min Cui, Dong-Ping Wu
Materiálatiipa: Artigo
Giella:Inglês
Almmustuhtton: MDPI AG 2023-01-01
Ráidu:Micromachines
Fáttát:
Liŋkkat:https://www.mdpi.com/2072-666X/14/2/280
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