MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge
A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors....
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| Principais autores: | , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI AG
2015-04-01
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| Serier: | Sensors |
| Fag: | |
| Online adgang: | http://www.mdpi.com/1424-8220/15/5/10004 |
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