High-efficiency grating couplers for vertical coupling in thin-film silicon nitride technology
Abstract Silicon nitride has become increasingly prominent in the integrated photonics research community during the last two decades, with an ever-growing number of demonstrations reported for different applications. In particular, thin-film silicon nitride platforms are attracting increasing inter...
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| Autors principals: | , , , , , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Portfolio
2026-04-01
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| Col·lecció: | Scientific Reports |
| Accés en línia: | https://doi.org/10.1038/s41598-026-44998-0 |
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