No-code method for lithography template cell parameterization for faster design cycles
This work presents a Python-based architecture packaged as a standalone tool, to enable the parameterization of lithography structures without the need for scripting. By feeding a lithography template file obtained from an existing layout editor into the tool, a ‘scaffold’ shape is created and recog...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Elsevier
2024-09-01
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| coleção: | Micro and Nano Engineering |
| Assuntos: | |
| Acesso em linha: | http://www.sciencedirect.com/science/article/pii/S2590007224000443 |
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