Multiphysics Modeling of Hot-Wall CVD Deposition of W–C–B Coatings for Process Optimization
In this study, a multiphysics finite-element model was developed for the deposition of W–C–B coatings in a hot-wall tubular CVD reactor from a gas mixture of tungsten hexafluoride (WF<sub>6</sub>), hydrogen (H<sub>2</sub>), and trimethylamine borane ((CH<sub>3</sub>)<sub>3</sub>N:BH<sub>3</sub>) at...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2026-04-01
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| coleção: | Ceramics |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2571-6131/9/5/47 |
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