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A Review of MEMS Capacitive Microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

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שמור ב:
Principais autores: Siti Aisyah Zawawi, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis, Faisal Mohd-Yasin
פורמט: Artigo
שפה:Inglês
יצא לאור: MDPI AG 2020-05-01
סדרה:Micromachines
נושאים:
micro-electro-mechanical system (MEMS)
capacitive microphone
condenser microphone
acoustic sensor
evolution
גישה מקוונת:https://www.mdpi.com/2072-666X/11/5/484
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