Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams
A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the...
Gorde:
| Egile Nagusiak: | , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI AG
2020-03-01
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| Saila: | Sensors |
| Gaiak: | |
| Sarrera elektronikoa: | https://www.mdpi.com/1424-8220/20/6/1780 |
| Etiketak: |
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