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High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)

Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary interconnection industries and disruptive applications. Here, we demonstrated the design and fabrication of a high...

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Principais autores: Rongbo Wu, Lang Gao, Youting Liang, Yong Zheng, Junxia Zhou, Hongxin Qi, Difeng Yin, Min Wang, Zhiwei Fang, Ya Cheng
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2022-02-01
Serier:Micromachines
Fag:
lithium niobate
electro-optic modulator
insertion loss
photolithography assisted chemo-mechanical etching
Online adgang:https://www.mdpi.com/2072-666X/13/3/378
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