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NO gas sensing at room temperature using single titanium oxide nanodot sensors created by atomic force microscopy nanolithography

In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with c...

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Principais autores: Li-Yang Hong, Heh-Nan Lin
Format: Artigo
Sprog:Inglês
Udgivet: Beilstein-Institut 2016-07-01
Serier:Beilstein Journal of Nanotechnology
Fag:
atomic force microscopy nanolithography
photo-activation
photo-recovery
resistive NO gas sensor
titanium oxide nanodot sensor
Online adgang:https://doi.org/10.3762/bjnano.7.97
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