Tantalum oxide thin films for electrochemical pH sensor

Present work demonstrates the fabrication and utilization of tantalum oxide (Ta _2 O _5 ) thin films as prominent pH sensing electrode material. Ta _2 O _5 film of 1 μ m thickness was deposited on glass substrates using physical vapor deposition technique. Structural and morphological studies were p...

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Bibliografski detalji

Glavni autori:	Nancy Sharma, Mukesh Kumar, Neelam Kumari, Akash Deep, J K Goswamy, Amit L Sharma
Format:	Artigo
Jezik:	Inglês
Izdano:	IOP Publishing 2020-01-01
Serija:	Materials Research Express
Teme:	metal oxide physical vapor deposition pH sensing amperometry linear sweep voltammetry
Online pristup:	https://doi.org/10.1088/2053-1591/ab7ced
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