Growth equipment for production of semi-insulating GaAs by the Czochralski method
A brief description and comparison of the liquid-encapsulated Czochralski (LEC) method with other growth techniques is presented, as well as its role in the development of semi-insulating GaAs technology. Information is provided on modern developments in growth equipment for producing large-diameter...
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| Hauptverfasser: | , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Politekhperiodika
2006-12-01
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| Schriftenreihe: | Технологія та конструювання в електронній апаратурі |
| Schlagworte: | |
| Online-Zugang: | https://tkea.com.ua/index.php/journal/article/view/896 |
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