Comparative Study About the Structural Properties of ZnO Films Grown on Si, GaAs, And Al2O3 Substrates and a GaN Template
We report on the structural properties of ZnO films grown on (001) Si, (001) GaAs, (0001) Al2O3 substrates and a (0001) GaN template by RF-sputtering. It is observed that all the ZnO films have textured structures with a preferred orientation of the c-axis, irrespective growth conditions, in terms o...
Tallennettuna:
| Päätekijät: | , , , |
|---|---|
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
EDP Sciences
2016-01-01
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| Sarja: | MATEC Web of Conferences |
| Linkit: | http://dx.doi.org/10.1051/matecconf/20167801107 |
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