A New Chemical Mechanical Slurry for Polishing Yttrium Aluminium Garnet Material with Magnesium oxide, Sodium Metasilicate Pentahydrate and Zirconium Dioxide Abrasive Particles
This work provided a new chemical-mechanical polishing mixture with MgO, sodium metasilicate pentahydrate, ZrO2 abrasive particles, and deionized water. With chemical-mechanical slurry (CMS) proposed for polishing yttrium aluminum oxide (Y3Al5O12) the surface reaction layer formed with significantly...
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| Asıl Yazarlar: | , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Publishing House of Wrocław Board of Scientific Technical Societies Federation NOT
2023-02-01
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| Seri Bilgileri: | Journal of Machine Engineering |
| Konular: | |
| Online Erişim: | http://jmacheng.not.pl/A-New-Chemical-Mechanical-Slurry-for-Polishing-Yttrium-Aluminium-Garnet-Material,159661,0,2.html |
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