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Investigation on a Linear Piezoelectric Actuator Based on Stick-Slip/Scan Excitation

To perform a high resolution and long stroke application in optical precision instruments, a linear piezoelectric actuator operated in stick-slip/scan modes for driving a linear motion table is presented. The proposed piezoelectric actuator is a piezoelectric composite structure, which includes a me...

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Principais autores: Yunlai Shi, Chengshu Lou, Jun Zhang
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2021-02-01
Serier:Actuators
Fag:
stick-slip mode
scan mode
linear motion table
high resolution
piezoelectric actuator
Online adgang:https://www.mdpi.com/2076-0825/10/2/39
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