Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrot...

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Autors principals:	Nathan Nakamura, Paul Szypryt, Amber L. Dagel, Bradley K. Alpert, Douglas A. Bennett, William Bertrand Doriese, Malcolm Durkin, Joseph W. Fowler, Dylan T. Fox, Johnathon D. Gard, Ryan N. Goodner, James Zachariah Harris, Gene C. Hilton, Edward S. Jimenez, Burke L. Kernen, Kurt W. Larson, Zachary H. Levine, Daniel McArthur, Kelsey M. Morgan, Galen C. O’Neil, Nathan J. Ortiz, Christine G. Pappas, Carl D. Reintsema, Daniel R. Schmidt, Peter A. Schultz, Kyle R. Thompson, Joel N. Ullom, Leila Vale, Courtenay T. Vaughan, Christopher Walker, Joel C. Weber, Jason W. Wheeler, Daniel S. Swetz
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2024-04-01
Col·lecció:	Sensors
Matèries:	X-ray nanotomography X-ray imaging integrated circuits computed tomography
Accés en línia:	https://www.mdpi.com/1424-8220/24/9/2890
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