High-velocity laser Doppler vibrometry measurements on an aluminum nitride bimorph wedge resonator
Abstract Recent advances in microelectromechanical systems (MEMS) have advanced inertial sensor technology. For resonant gyroscopes, sensitivity scales with the maximum velocity of the resonating mass, as higher velocities amplify the Coriolis force for faster and more accurate inertial signal detec...
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| Main Authors: | , , , , , , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
Nature Portfolio
2026-02-01
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| Series: | Communications Engineering |
| Online Access: | https://doi.org/10.1038/s44172-026-00595-7 |
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