Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen...

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Detalhes bibliográficos

Principais autores:	Qifeng Qiao, Haoyang Sun, Xinmiao Liu, Bowei Dong, Ji Xia, Chengkuo Lee, Guangya Zhou
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2021-10-01
Colecção:	Micromachines
Assuntos:	silicon photonics MIR photonics optical MEMS photonic integrated circuit reconfigurable photonics
Acesso em linha:	https://www.mdpi.com/2072-666X/12/11/1311
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